DX100 MINOR ALARMS
- DX100 ALARM CODE 4355 EXTERNAL PRES DETECT (SERVOFLOAT)
- DX100 ALARM CODE 4356 ARM CONTROL PARAMETER ERROR (OBSERVER)
- DX100 ALARM CODE 4357 IMPOSSIBLE SEARCH (EQUALIZE TEACH)
- DX100 ALARM CODE 4358 DUPLICATED PRESS ERROR
- DX100 ALARM CODE 4359 CONVERTER ERROR
- DX100 ALARM CODE 4360 WAFER ALIGNMENT ERROR (SERVO)
- DX100 ALARM CODE 4362 POWER SUPPLY READY ERROR (SERVO)
- DX100 ALARM CODE 4363 BASE BLOCK SIGNAL ERROR (SERVO)
- DX100 ALARM CODE 4365 TOUCH DETECT DATA OVER
- DX100 ALARM CODE 4367 ROBOT POSE ERROR
- DX100 ALARM CODE 4371 SYSTEM ERROR (SERVO)
- DX100 ALARM CODE 4372 SERVO ON SIGNAL ERROR
- DX100 ALARM CODE 4373 MAGNETIC POLE DETECTING ERROR
- DX100 ALARM CODE 4374 PHASE DATA UNMATCH
- DX100 ALARM CODE 4376 ROLLER HEM FUNCTION ERROR
- DX100 ALARM CODE 4377 ROLLER HEM CONTROL GROUP ERROR
- DX100 ALARM CODE 4380 M-SAFETY PROCESS ERROR (CPU1)
- DX100 ALARM CODE 4381 M_SAFETY ENABLE SW ERROR (CPU1)
- DX100 ALARM CODE 4382 M-SAFETY PROCESS ERROR (CPU2)
- DX100 ALARM CODE 4383 M-SAFETY ENABLE SW ERROR (CPU2)
- DX100 ALARM CODE 4384 M-SAFETY SIGNAL ERROR (CPU1)
- DX100 ALARM CODE 4385 M-SAFETY INPUT CHECK ERROR (CPU1)
- DX100 ALARM CODE 4386 M-SAFETY OUTPUT CHECK ERROR CPU1
- DX100 ALARM CODE 4387 M-SAFETY CONTACTOR STICK (CPU1)(2)
- DX100 ALARM CODE 4388 M-SAFETY SERVO ON ERROR (CPU1)
- DX100 ALARM CODE 4389 M-SAFETY SIGNAL ERROR (CPU2)
- DX100 ALARM CODE 4392 M-SAFETY INPUT CHECK ERROR (CPU2)
- DX100 ALARM CODE 4393 M-SAFETY OUTPUT CHECK ERROR CPU2
- DX100 ALARM CODE 4394 M-SAFETY CONTACTOR STICK (CPU2)
- DX100 ALARM CODE 4395 M-SAFETY SERVO ON ERROR (CPU2)